Introduction产品简介
3M氟化液FC-40是无色透明全氟化学品，具有良好的化学惰性、电气绝缘性能、热传导性和独特的第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-57°C至155°C，主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-40是单一组分，其成分不好出现降解或者过期。FC-40沸点高，其随时间的挥发也比较少。
3M Fluorinert Electronic Liquid FC-40 is a clear, colorless,thermally stable, fully-?uorinated liquid ideal for use in manysingle phase heat transfer applications in the semiconductormanufacturing industry. Its liquid range (-57°C to 155°C) makes itideal for a variety of applications such as etchers, ionimplanters, testers and others. Because Fluorinert liquid FC-40 isprimarily a single compound, its composition will not shift orfractionate with time. This keeps fluid loss to a minimum andinsures that transport properties will not change with time.
Physical Properties物理化学性质
Not for specication purposes All values determined at 25°Cunless otherwise speci?ed
